photolithography
Từ liên quan
lithographyetchingsemiconductorwafersiliconphotoresistmaskexposurephotonwavelengthultravioletlaseropticslensmicrochipintegrated circuitnanotechnologyfabricationdepositiondopingdiffusionoxidationplasmavacuumclean roomresolutionmicronnanometerpatterningcircuitrytransistordiodecapacitorsubstrateepitaxydeveloperstripperpolymerchemistrycatalystrefractiondiffractioninterferencestepperscannerprojectionalignmentlayerdiemicroelectronicsphotochemistrylightradiationexposure timecontrastsensitivitymaskingetchantcorrosionsurfacetopologydielectricconductorinsulatorgermaniumgallium arsenidemicrofabricationnanolithography