cryopump
Số nhiều: cryopumps
Từ liên quan
vacuumcryogenicscondensationsublimationdesorptionheliumnitrogencompressorcryostatpressuregasvapormoleculeadsorptionabsorptioncoolingrefrigerationtemperaturekelvinvacuum pumpion pumpchambersealvalvemanifoldevacuationoutgassingplasmasputteringdepositionepitaxysemiconductorphysicsthermodynamicsentropyenthalpylatent heatconductionconvectionradiationinsulationdewarvacuum gaugetorrpascalmean free pathcollisionregenerationleakpermeationcompressibilitythermal conductivityheat exchangersuperconductorsuperfluidityliquid heliumliquid nitrogen