cryopump
pl: cryopumps
Related Words
vacuumcryogenicscondensationsublimationdesorptionheliumnitrogencompressorcryostatpressuregasvapormoleculeadsorptionabsorptioncoolingrefrigerationtemperaturekelvinvacuum pumpion pumpchambersealvalvemanifoldevacuationoutgassingplasmasputteringdepositionepitaxysemiconductorphysicsthermodynamicsentropyenthalpylatent heatconductionconvectionradiationinsulationdewarvacuum gaugetorrpascalmean free pathcollisionregenerationleakpermeationcompressibilitythermal conductivityheat exchangersuperconductorsuperfluidityliquid heliumliquid nitrogen