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microfabrication

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nanofabrication lithography photolithography etching deposition sputtering evaporation doping wafer silicon semiconductor cleanroom vacuum plasma photoresist mask exposure development oxidation diffusion epitaxy substrate die chip circuit integrated-circuit transistor diode capacitor microfluidics actuator sensor precision miniaturization scale micron nanometer beam laser stamping molding electroplating isotropic anisotropic synchrotron packaging encapsulation interconnect via dielectric insulator conductor germanium piezoelectric electrostatic thermal biochip nanostructure metrology cleanliness particle contamination

Last Updated: May 2026•Report an Error

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