photolithography
Related Words
lithographyetchingsemiconductorwafersiliconphotoresistmaskexposurephotonwavelengthultravioletlaseropticslensmicrochipintegrated circuitnanotechnologyfabricationdepositiondopingdiffusionoxidationplasmavacuumclean roomresolutionmicronnanometerpatterningcircuitrytransistordiodecapacitorsubstrateepitaxydeveloperstripperpolymerchemistrycatalystrefractiondiffractioninterferencestepperscannerprojectionalignmentlayerdiemicroelectronicsphotochemistrylightradiationexposure timecontrastsensitivitymaskingetchantcorrosionsurfacetopologydielectricconductorinsulatorgermaniumgallium arsenidemicrofabricationnanolithography