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microfabrication

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nanofabrication lithography photolithography etching deposition semiconductor wafer silicon cleanroom plasma epitaxy doping diffusion oxidation sputtering evaporation photoresist mask substrate nanotechnology microelectronics integrated circuit chip transistor diode capacitor sensor actuator microfluidics lab on a chip precision miniaturization scale micron nanometer vacuum annealing polishing lapping electroplating dielectric conductor insulator germanium gallium arsenide quartz glass polymer atomic force microscope metrology fabrication manufacturing engineering physics chemistry material science circuitry interconnect via layering thin film adhesion contamination particle yield prototyping

Last Updated: July 7, 2026•Report an Error

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